Ion Beam Planning Tool

Calculate heavy-ion LET and range at your device after overlayer energy loss. Find the right beams for your SEE test.

v1.0 · Apr 2026 Help & Reference
Disclaimer: For preliminary test planning only. Verify all beam parameters with the facility before scheduling beam time. Calculations are estimates, actual LET may differ by 5–10% from measured values. See the Help & Reference page for methodology details and references.
Beam Medium
Target Material
Overlayer Stackup (beam enters layer 1 first)
Material and thickness (in micrometers) for each layer the beam passes through before reaching the device.
Test Requirements
Tilt Angle Range
If a beam doesn't meet the LET requirement at normal incidence, the tool calculates the exact tilt angle needed. Effective LET = LET / cos(θ).
Note: High tilt angles require sufficient clearance between the beam window and DUT. A 1–3 cm air gap may not physically allow angles above ~35–45°. Verify your setup geometry with the facility.
Facility Filter
LET vs Range
X-axis: Y-axis:
Beam Results
Configure your stackup and requirements, then click Find Beams.